Development of Flexible Inserter for IC Chip Testing

Toshihiro Taguchi

Engineer Division, SAKURAI SEIGI Co., Ltd. 135 Tanigawa Okamachi, Yatsushiro-city, Kumamoto 869-4613, Japan

Received:

December 26, 2000

Accepted:

January 13, 2001

Published:

June 20, 2001

Keywords:

inserter, passive compliance unit, contact, force control, IC

Abstract

In the last stage of semiconductor manufacturing process, IC is inserted in the testing equipment for many kinds of electrical characteristics test. But the use of position control causes many problems such as shortage or overdose of pressing force, the non-uniformity of pressing force, and the shoulder touch phenomenon of IC pressing etc. Thus the testing process with stable and flexibly efficient handler is desired. In this paper, focusing on IC packages such as BGA and CSP, the development of flexible inserter for IC testing based on force control and with a new passive compliance unit (PCU) is reported to improve testing throughput drastically.

Cite this article as:

T. Taguchi, “Development of Flexible Inserter for IC Chip Testing,” J. Robot. Mechatron., Vol.13 No.3, pp. 289-293, 2001.

Data files:

This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.