Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

LETTER

Sunghan Choi, Akio Higo, Masaru Zaitsu, Myung-Joon Kwack, Masakazu Sugiyama, Hiroshi Toshiyoshi, Yoshiaki Nakano

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Keywords: slanted etching, optical waveguide, optical coupler

JOURNAL FREE ACCESS

2013 Volume 10 Issue 6 Pages 20130116

DOI https://doi.org/10.1587/elex.10.20130116

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Abstract

We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.

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