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"SITAR-an efficient 3-D simulator for optimization of nonplanar trench ..."

Wolfgang Bergner, Roland Kircher (1990)

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DOI: 10.1109/43.62755

access: closed

type: Journal Article

metadata version: 2020-09-24

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  dblp key:
  - journals/tcad/BergnerK90
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Wolfgang Bergner, Roland Kircher:
SITAR-an efficient 3-D simulator for optimization of nonplanar trench structures. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 9(11): 1184-1188 (1990)

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