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"Unstructured tetrahedric meshes for the description of complex ..."

Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa (2013)

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DOI: 10.1016/J.MICROREL.2013.07.131

access: closed

type: Journal Article

metadata version: 2020-02-22

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Emre Ilgünsatiroglu, Alexey Yu. Illarionov, Mauro Ciappa:
Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications. Microelectron. Reliab. 53(9-11): 1381-1386 (2013)

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