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"Yield improvement via minimisation of step height non-uniformity in ..."

Muthukkumar S. Kadavasal et al. (2005)

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DOI: 10.1504/IJMTM.2005.007698

access: closed

type: Journal Article

metadata version: 2020-06-04

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Muthukkumar S. Kadavasal, Abhijit Chandra, Sutee Eamkajornsiri, Ashraf-F. Bastawros:
Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables. Int. J. Manuf. Technol. Manag. 7(5/6): 467-489 (2005)

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