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"Enabling Fabrication of PZT Based PiezoMEMS Devices."

Sudhanshu Tiwari et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589565

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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  - conf/ieeesensors/TiwariKDP18
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Sudhanshu Tiwari, Randhir Kumar, Ajay Dangi, Rudra Pratap:
Enabling Fabrication of PZT Based PiezoMEMS Devices. IEEE SENSORS 2018: 1-4

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