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"Back-end-of-line CMOS-compatible diode fabrication with pure boron ..."

Tihomir Knezevic et al. (2019)

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DOI: 10.1109/ESSDERC.2019.8901810

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Tihomir Knezevic, Tomislav Suligoj, Xingyu Liu, Lis K. Nanver, Ahmed Elsayed, Jan F. Dick, Jörg Schulze:
Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C. ESSDERC 2019: 242-245

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