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"Monte Carlo modeling of the extraction of roughness parameters at ..."

Mauro Ciappa et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948834

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov, F. Filosomi, C. Santini:
Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy. ESSDERC 2014: 357-360

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