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"Monolithic Composite "Pressure + Acceleration + Temperature + Infrared" ..."

Zao Ni et al. (2013)

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DOI: 10.3390/S130101085

access: open

type: Journal Article

metadata version: 2018-11-14

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  - journals/sensors/NiYXZZLXL13
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  - https://dblp.org/rec/journals/sensors/NiYXZZLXL13
Zao Ni, Chen Yang, Dehui Xu, Hong Zhou, Wei Zhou, Tie Li, Bin Xiong, Xinxin Li:
Monolithic Composite "Pressure + Acceleration + Temperature + Infrared" Sensor Using a Versatile Single-Sided "SiN/Poly-Si/Al" Process-Module. Sensors 13(1): 1085-1101 (2013)

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