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"Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in ..."

Guoqiang Wu et al. (2019)

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DOI: 10.1109/TIE.2018.2851946

access: closed

type: Journal Article

metadata version: 2020-05-22

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Guoqiang Wu, Beibei Han, Daw Don Cheam, Leong Ching Wai, Peter Hyun Kee Chang, Navab Singh, Yuandong Gu:
Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform. IEEE Trans. Ind. Electron. 66(5): 3835-3842 (2019)

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