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"Modeling and simulation of material handling for semiconductor wafer ..."

Neal G. Pierce, Richard Stafford (1994)

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DOI: 10.1109/WSC.1994.717466

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  - https://dblp.org/rec/conf/wsc/PierceS94
Neal G. Pierce, Richard Stafford:
Modeling and simulation of material handling for semiconductor wafer fabrication. WSC 1994: 900-906

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