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"Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a ..."

Andy Ham et al. (2020)

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DOI: 10.1109/WSC48552.2020.9384027

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Andy Ham, Myoung-Ju Park, Ho-Jun Shin, Si-Young Choi, John W. Fowler:
Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a Semiconductor Manufacturing. WSC 2020: 1966-1973

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