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"Integration of epitaxial monolayer MX₂ channels on 300mm wafers via ..."

Souvik Ghosh et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185215

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Souvik Ghosh, Quentin Smets, S. Banerjee, Tom Schram, K. Kennes, R. Verheyen, P. Kumar, M.-E. Boulon, Benjamin Groven, H. M. Silva, Shreya Kundu, Daire Cott, Dennis Lin, P. Favia, T. Nuytten, A. Phommahaxay, Inge Asselberghs, C. De La Rosa, Gouri Sankar Kar, Steven Brems:
Integration of epitaxial monolayer MX₂ channels on 300mm wafers via Collective-Die-To-Wafer (CoD2W) transfer. VLSI Technology and Circuits 2023: 1-2

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