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"Microstructures with Protected Convex Corners in Modified KOH Solution ..."

Avvaru Venkata Narasimha Rao et al. (2018)

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DOI: 10.1109/ICSENS.2018.8589751

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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  - conf/ieeesensors/RaoSPP18
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Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal:
Microstructures with Protected Convex Corners in Modified KOH Solution Exhibiting High-Speed Silicon Etching. IEEE SENSORS 2018: 1-4

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