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"Development of composite vertical wet etching for silicon material."

Mao-Jung Huang et al. (2014)

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DOI: 10.1109/NEMS.2014.6908875

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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Mao-Jung Huang, Chun-Ming Chang, Nien-Nan Chu, Yu-Hsiang Tang, Chii-Rong Yang:
Development of composite vertical wet etching for silicon material. NEMS 2014: 564-567

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