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"Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures."

Slawomir Wiak, Krzysztof Smólka (2011)

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DOI: 10.1007/978-3-642-16225-1_1

access: closed

type: Part in Book or Collection

metadata version: 2019-10-19

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Slawomir Wiak, Krzysztof Smólka:
Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures. Computational Methods for the Innovative Design of Electrical Devices 2011: 1-18

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