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"Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners."
Ali Bazaei et al. (2016)
- Ali Bazaei, Mohammad Maroufi, Anthony G. Fowler, S. O. Reza Moheimani:
Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners. IEEE Trans. Control. Syst. Technol. 24(5): 1717-1728 (2016)
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