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"Induced Start Dynamic Sampling for Wafer Metrology Optimization."

Gian Antonio Susto et al. (2020)

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DOI: 10.1109/TASE.2019.2929193

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - journals/tase/SustoMZM20
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  - https://dblp.org/rec/journals/tase/SustoMZM20
Gian Antonio Susto, Marco Maggipinto, Federico Zocco, Seán F. McLoone:
Induced Start Dynamic Sampling for Wafer Metrology Optimization. IEEE Trans Autom. Sci. Eng. 17(1): 418-432 (2020)

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