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"Design optimization of RF-MEMS switch considering thermally induced ..."

Muhammad Mubasher Saleem, Aurelio Somà (2015)

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DOI: 10.1016/J.MICROREL.2015.07.026

access: closed

type: Journal Article

metadata version: 2020-02-22

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Muhammad Mubasher Saleem, Aurelio Somà:
Design optimization of RF-MEMS switch considering thermally induced residual stress and process uncertainties. Microelectron. Reliab. 55(11): 2284-2298 (2015)

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