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"Influence of the manufacturing process on the electrical properties of ..."

Mario Lanza et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.045

access: closed

type: Journal Article

metadata version: 2022-12-07

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Mario Lanza, Marc Porti, Montserrat Nafría, Guenther Benstetter, Werner Frammelsberger, Heiko Ranzinger, E. Lodermeier, G. Jaschke:
Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM. Microelectron. Reliab. 47(9-11): 1424-1428 (2007)

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