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"Impacts of plasma process-induced damage on MOSFET parameter variability ..."

Koji Eriguchi, Kouichi Ono (2015)

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DOI: 10.1016/J.MICROREL.2015.07.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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Koji Eriguchi, Kouichi Ono:
Impacts of plasma process-induced damage on MOSFET parameter variability and reliability. Microelectron. Reliab. 55(9-10): 1464-1470 (2015)

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