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"Design And Fabrication of Condenser Microphone Using Wafer Transfer And ..."

Zhen-Zhun Shu et al. (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0805-0856
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0805-0856
Zhen-Zhun Shu, Ming-Li Ke, Guan-Wei Chen, Ray Hua Horng, Chao-Chih Chang, Jean-Yih Tsai, Chung-Ching Lai, Ji-Liang Chen:
Design And Fabrication of Condenser Microphone Using Wafer Transfer And Micro-electroplating Technique. CoRR abs/0805.0856 (2008)

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