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"Ultra-small butt-joint Ge photodetector featuring self-aligned in-situ ..."

Makoto Miura et al. (2014)

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DOI: 10.1364/OFC.2014.M2G.5

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
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Makoto Miura, Junichi Fujikata, Masataka Noguchi, Yasuhiko Arakawa:
Ultra-small butt-joint Ge photodetector featuring self-aligned in-situ doping and CMP-free novel CVD process. OFC 2014: 1-3

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