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"Cut mask optimization with wire planning in self-aligned multiple ..."

Shao-Yun Fang (2015)

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DOI: 10.1109/ASPDAC.2015.7059037

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Shao-Yun Fang:
Cut mask optimization with wire planning in self-aligned multiple patterning full-chip routing. ASP-DAC 2015: 396-401

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