EP 3139400 B1 20180228 - POSITION CORRECTION SAMPLE, MASS SPECTROMETRY DEVICE, AND MASS SPECTROMETRY METHOD
Title (en)
POSITION CORRECTION SAMPLE, MASS SPECTROMETRY DEVICE, AND MASS SPECTROMETRY METHOD
Title (de)
POSITIONSKORREKTURPROBE, MASSENSPEKTROMETRIEVORRICHTUNG UND MASSENSPEKTROMETRIEVERFAHREN
Title (fr)
ÉCHANTILLON DE CORRECTION DE POSITION, DISPOSITIF DE SPECTROMÉTRIE DE MASSE ET PROCÉDÉ DE SPECTROMÉTRIE DE MASSE
Publication
Application
Priority
JP 2015174997 A 20150904
Abstract (en)
[origin: EP3139400A1] According to an embodiment, a position correction sample (20) is used to correct an irradiation position of an ion beam with respect to a sample platform where an analysis object is disposed in mass spectrometry. The position correction sample (20) comprises a stacked body (LB1). The stacked body includes a first layer (201), a second layer (202), and a third layer (203). The first layer includes a first material. The second layer is provided on the first layer. The second layer includes a second material. The third layer is provided on the second layer. The third layer includes a third material.
IPC 8 full level
H01J 49/00 (2006.01); H01J 49/14 (2006.01); H01J 49/16 (2006.01)
CPC (source: EP)
H01J 49/0004 (2013.01); H01J 49/0009 (2013.01); H01J 49/142 (2013.01); H01J 49/161 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3139400 A1 20170308; EP 3139400 B1 20180228; JP 2017049216 A 20170309; JP 6430349 B2 20181128
DOCDB simple family (application)
EP 16185874 A 20160826; JP 2015174997 A 20150904