EP 1678734 A1 20060712 - ELECTRON DETECTION SYSTEM FOR A SCANNING ELECTRON MICROSCOPE
Title (en)
ELECTRON DETECTION SYSTEM FOR A SCANNING ELECTRON MICROSCOPE
Title (de)
ELEKTRONENDETEKTIONSSYSTEM FÜR EIN RASTERELEKTRONENMIKROSKOP
Title (fr)
SYSTEME DE DETECTION D'ELECTRONS POUR MICROSCOPE ELECTRONIQUE A BALAYAGE
Publication
Application
Priority
- PL 2004000079 W 20041006
- PL 36313103 A 20031027
Abstract (en)
[origin: WO2005041243A1] The electron detection system for a scanning electron microscope is mounted in the head body (1), made of teflon. In the lower part of the head body (1), the lower throttling aperture (2) of the form of the metal plate with a small hole at the axis of the electron beam WE is placed. Above the lower throttling aperture (2), the micro-porous plate (3) is located. The micro-porous plate (3) has a hole at the axis of the electron beam WE, in which the screen pipe (4) is fastened by means of the teflon sealing. Over the micro-porous plate (3), scintillators (5) are disposed symmetrically around the electron beam WE axis. Scintillators (5) are connected with the light pipes (6) that lead to photomultipliers.
IPC 1-7
IPC 8 full level
G02B 21/00 (2006.01); G12B 21/00 (2006.01); H01J 37/244 (2006.01)
CPC (source: EP)
H01J 37/244 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/24435 (2013.01)
Citation (search report)
See references of WO 2005041243A1
Citation (examination)
SLOWKO W ED - KOK CHI-WAH ET AL: "Directional detection of secondary electrons for electron beam profilography", VACUUM, PERGAMON PRESS, GB, vol. 52, no. 4, 1 January 1999 (1999-01-01), pages 441 - 449, XP002316008, ISSN: 0042-207X, DOI: 10.1016/S0042-207X(98)00329-7
Designated contracting state (EPC)
CZ DE GB NL
DOCDB simple family (publication)
WO 2005041243 A1 20050506; EP 1678734 A1 20060712; PL 208151 B1 20110331; PL 363131 A1 20050502
DOCDB simple family (application)
PL 2004000079 W 20041006; EP 04775185 A 20041006; PL 36313103 A 20031027