Search Results (10)

This study presents a new design for a MEMS electrostatic speaker array with out-of-plane piston-like diaphragm displacement using a simplified silicon-on-insulator microfabrication process. The device comprises an array of parallel actuating membranes with small circular mechanically open but acoustically sealed apertures that enable controlled etching of the buried oxide to be released directly from the front side, but retain a high acoustic impedance acting as a flat membrane. This approach simplifies the microfabrication process, requiring only two lithography masks and increasing process tolerances. Preliminary experimental measurements validate the concept and demonstrate the electromechanical and acoustic performance compared with theoretical models. Full article

Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation to a parabolic mirror. The device is fabricated with a minimal membrane diameter, but at least double the size of a focused optical spot. The theory and simulations are used to predict maximum relative focal shifts as a function of membrane size and deflection, beam waist, and incident focal position. These devices are demonstrated to enable fast tuning of the focal wavefront of laser beams at ≈MHz tuning rates, two to three orders of magnitude faster than current optical focusing technologies. The fabricated devices have a silicon membrane with a 30–100 μm radius and a 350 nm gap spacing between the top and bottom electrodes. These devices can change the focal position of a tightly focused beam by ≈1 mm at rates up to 4.9 MHz and with response times smaller than 5 μs. Full article

Energy harvesters are devices that accumulate ambient vibrational energy from the environment, and for the time being, variable capacitance is the most widely used mechanism. Various designs were proposed to increase the power of such devices, and in particular, the interdigitated electrode (IDE) pattern is the mainstream. Nevertheless, most IDE designs focus merely on the parallel-type vibrations of electrodes. In this study, the performance of a novel harvester, which combined circular membrane and interdigitated ring electrodes (IRE), was investigated. This design allows the device to collect energy from the rotational structure motions of electrodes through the vibrating membrane. Besides, the circular structure provides a dense capacitive arrangement that is higher than that of the arrangement obtained using regular rectangular chips. The IRE diagram is composed of many capacitive rings, each of which harvests vibrated energy simultaneously. Three gaps (1, 10, and 100 μm) of the ring are investigated for the first four vibrational modes of the membrane to understand the effect of energy output. It is found that the energy outputs are approximately the same for the three gaps; however, rings with a wider gap are easier to manufacture in MEMS. Full article

In this study, an accurate analytic semi-linear elliptic differential model for a circular membrane MEMS device, which considers the effect of the fringing field on the membrane curvature recovering, is presented. A novel algebraic condition, related to the membrane electromechanical properties, able to govern the uniqueness of the solution, is also demonstrated. Numerical results for the membrane profile, obtained by using the Shooting techniques, the Keller–Box scheme, and the III/IV Stage Lobatto IIIa formulas, have been carried out, and their performances have been compared. The convergence conditions, and the possible presence of ghost solutions, have been evaluated and discussed. Finally, a practical criterion for choosing the membrane material as a function of the MEMS specific application is presented. Full article

The recovery of the membrane profile of an electrostatic micro-electro-mechanical system (MEMS) is an important issue, because, when an external electrical voltage is applied, the membrane deforms with the risk of touching the upper plate of the device producing an unwanted electrostatic effect. Therefore, it is important to know whether the movement admits stable equilibrium configurations especially when the membrane is closed to the upper plate. In this framework, this work analyzes the behavior of a two-dimensional (2D) electrostatic circular membrane MEMS device subjected to an external voltage. Specifically, starting from a well-known 2D non-linear second-order differential model in which the electrostatic field in the device is proportional to the mean curvature of the membrane, the stability of the only possible equilibrium configuration is studied. Furthermore, when considering that the membrane is equipped with mechanical inertia and that it must not touch the upper plate of the device, a useful range of possible values has been obtained for the applied voltage. Finally, the paper concludes with some computations regarding the variation of potential energy, identifying some optimal control conditions. Full article

An important problem in membrane micro-electric-mechanical-system (MEMS) modeling is the fringing-field phenomenon, of which the main effect consists of force-line deformation of electrostatic field $\mathbf{E}$ near the edges of the plates, producing the anomalous deformation of the membrane when external voltage V is applied. In the framework of a 2D circular membrane MEMS, representing the fringing-field effect depending on ${|\nabla u|}^2$ with the u profile of the membrane, and since strong $\mathbf{E}$ produces strong deformation of the membrane, we consider $\left|\mathbf{E}\right|$ proportional to the mean curvature of the membrane, obtaining a new nonlinear second-order differential model without explicit singularities. In this paper, the main purpose was the analytical study of this model, obtaining an algebraic condition ensuring the existence of at least one solution for it that depends on both the electromechanical properties of the material constituting the membrane and the positive parameter $\delta$ that weighs the terms ${|\nabla u|}^2$. However, even if the the study of the model did not ensure the uniqueness of the solution, it made it possible to achieve the goal of finding a stable equilibrium position. Moreover, a range of admissible values of V were obtained in order, on the one hand, to win the mechanical inertia of the membrane and, on the other hand, to ensure that the membrane did not touch the upper disk of the device. Lastly, some optimal control conditions based on the variation of potential energy are presented and discussed. Full article

In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis. Full article

In the framework of 2D circular membrane Micro-Electric-Mechanical-Systems (MEMS), a new non-linear second-order differential model with singularity in the steady-state case is presented in this paper. In particular, starting from the fact that the electric field magnitude is locally proportional to the curvature of the membrane, the problem is formalized in terms of the mean curvature. Then, a result of the existence of at least one solution is achieved. Finally, two different approaches prove that the uniqueness of the solutions is not ensured. Full article

An energy conversion microchip consisting of two circular microchambers and a Nafion-filled microchannel is fabricated using standard micro-electro-mechanical systems (MEMS) techniques. When the chambers are filled with KCl solutions with different concentrations, the Nafion microchannel acts as a cation-selective membrane and results in the generation of electrical power through a reverse electrodialysis (RED) process. The current-potential characteristics of the Nafion membrane are investigated for devices with various microchannel lengths and electrolyte concentration ratios. It is shown that for a given voltage, the current and generated power increase with a reducing channel length due to a lower resistance. In addition, a maximum power density of 755 mW/m² is obtained given an electrolyte concentration ratio of 2000:1 (unit is mM). The optimal device efficiency is found to be 36% given a channel length of 1 mm and a concentration ratio of 1000:1 (mM). Finally, no enhancement of the short circuit current is observed at higher concentration ratios. Full article

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive temperature detector (RTD). In the proposed device, the flow rate is inversely derived from the change in the resistance signal of the flow meter when exposed to the sensed air stream. To compensate for the effects of the ambient temperature on the accuracy of the flow rate measurements, the output signal from the flow meter is compensated using the resistance signal generated by the RTD. As air travels over the surface of the cross-form cantilever structure, the upstream cantilevers are deflected in the downward direction, while the downstream cantilevers are deflected in the upward direction. The deflection of the cantilever beams causes a corresponding change in the resistive signals of the piezoresistors patterned on their upper surfaces. The amount by which each beam deflects depends on both the flow rate and the orientation of the beam relative to the direction of the gas flow. Thus, following an appropriate compensation by the temperature-corrected flow rate, the gas flow direction can be determined through a suitable manipulation of the output signals of the four piezoresistors. The experimental results have confirmed that the resulting variation in the output signals of the integrated sensors can be used to determine not only the ambient temperature and the velocity of the air flow, but also its direction relative to the sensor with an accuracy of ± 7.5^o error. Full article