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Optica Publishing Group
Conferences > OFC > 2013 > OTu3C > OTu3C.5
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013
  • OSA Technical Digest (online) (Optica Publishing Group, 2013),
  • paper OTu3C.5
  • •https://doi.org/10.1364/OFC.2013.OTu3C.5

Micro-ring optical resonators fabricated by selective oxidation of refractory metals (SORM)

Payam Rabiei, Jichi Ma, Saeed Khan, Jeff Chiles, and Sasan Fathpour

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Abstract

A novel platform for integrated photonic circuits is proposed based on selective oxidation of refractory metals (SORM). Low-loss tantalum pentoxide coupled micro-ring optical resonators and high-index contrast ridge waveguides are demonstrated based on this platform.

© 2013 Optical Society of America

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