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A concurrent pattern operation algorithm for VLSI mask data

Published: 29 June 1981 Publication History

Abstract

A new pattern operation algorithm effective for VLSI mask data is presented. It conducts intersection-point calculation, slit division, and logical processing simultaneously. A new algorithm for intersection-point calculation is also presented. Using these algorithms, a pattern operation program package (VSOP) has been developed that is applicable to several mask artwork systems in common, and that has 21 functions. The execution time for VSOP varies approximately in proportion to the number of input vectors. CPU time for 1,000,000 vectors is 200 seconds.

References

[1]
H. S. Baird, "Fast Algorithms for LSI Artwork Analysis", Proc. of the 14th DA Conf., June 1977, pp. 303-311.
[2]
K. Yoshida, T. Mitsuhashi, Y. Nakada, T. Chiba, K. Ogita, and S. Nakatsuka, "A Layout Checking System for Large Scale Integrated Circuits", Proc. of the 14th DA Conf., June 1977, pp. 322-330.
[3]
P. Wilcox, H. Rombeek, and D.M. Caughey, "Design Rule Verification Based on One Dimensional Scans", Proc. of the 15th DA Conf., June 1978, pp. 285-289.
[4]
C. R. McCaw, "Unified Shapes Checker - A Checking Tool for LSI", Proc. of the 16th DA Conf., June 1979, pp. 81-87.
[5]
H. S. Baird and Y. E. Cho, "An Artwork Design Verification System", Proc. of the 12th DA Conf., June 1975, pp. 414-420.

Cited By

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  • (1983)MACH : a high-hitting pattern checker for VLSI mask dataProceedings of the 20th Design Automation Conference10.5555/800032.800752(726-731)Online publication date: 27-Jun-1983

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cover image ACM Conferences
DAC '81: Proceedings of the 18th Design Automation Conference
June 1981
899 pages

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IEEE Press

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Published: 29 June 1981

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  • (1983)MACH : a high-hitting pattern checker for VLSI mask dataProceedings of the 20th Design Automation Conference10.5555/800032.800752(726-731)Online publication date: 27-Jun-1983

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