A framework for effective shop floor control in wafer fabs
Authors: 
Zhugen Zhou, Oliver RoseAuthors Info & Claims
Pages 3001 - 3012
Abstract
In order to gain a competitive position within industry, in semiconductor fabs enormous efforts have been spent in developing different kinds of operational control strategies relating to work-in-process (WIP) and due date. This paper presents a framework to deal with shop floor control problems regarding WIP balance and due date control. The framework comprises four key components that are (1) Global and local rules; (2) Target WIP estimation; (3) WIP imbalance monitor and detection; (4) WIP imbalance calibration. These four components clearly focus on their own specific tasks and support each other, in such a way that we can manage to: (1) Improve efficiency and productivity such as achieving low WIP and cycle time while keeping good on-time delivery; (2) Enhance intelligence of automated manufacturing such as reducing WIP variability and smoothing material flow via automated WIP imbalance monitor and correction.
References
[1]
Baker, K. R., and D. Trietsch. 2009. Principle of Sequencing and Scheduling. Wiley Publishing: John Wiley & Sons, Inc.
[2]
Chambers M., and C. A. Mount-Campbell. 2002. "Process Optimization via Neural Network Metamodeling." International Journal of Production Economics 79:93--100.
[3]
Dabbas, R. M., and J. W. Fowler. 2003. "A New Scheduling Approach Using Combined Dispatching Criteria in Wafer Fab." IEEE Transactions on Semiconductor Manufacturing 16:501--510.
[4]
Duemmler, M., and J. Wohlleben. 2012. "A Framework for Effective WIP Flow Management in Semiconductor Frontend Fabs." In Proceedings of the 2012 Winter Simulation Conference, edited by C. Laroque, J. Himmelspach, R. Pasupathy, O. Rose, and A. M. Uhrmacher, 2001-2006. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[5]
Fowler, J. W., and J. Robinson. 1995. "Measurement and Improvement of Manufacturing Capacities (MIMAC): Final report." Technical Report 95062861A-TR, SEMATECH, Austin.
[6]
Fowler, J. W., G. L. Hogg, and S. J. Mason. 2002 "Workload Control in the Semiconductor Industry." Production Planning & Control 13:568--578.
[7]
Guo, R. S., D. M. Chiang, and F. Y. Pai. 2007. "A WIP-based Exception-management Model for Integrated Circuit Back-end Production Processes." International Journal of Advanced Manufacturing Technology 33:1263--1274.
[8]
Ham, M., and J. W. Fowler. 2007. "Balanced Machine Workload Dispatching Scheme for Wafer Fab." In Advanced Semiconductor Manufacturing Conference 390--395.
[9]
Keskinocak P., and S. Tayur. 2004. "Due Date Management Policies." In Handbook of Quantitative Supply Chain Analysis: Modeling in the E-Business Era, International Series in Operations Research and Management Science 485--553.
[10]
Li, S., T. Tang, and D. W. Collins. 1996. "Minimum Inventory Variability Schedule with Applications in Semiconductor Fabrication." IEEE Transactions on Semiconductor Manufacturing 9:1--5.
[11]
Lin Y. H., and C. E. Lee. 2001 "A Total Standard WIP Estimation Method for Wafer Fabrication." European Journal of Operation Research 131:78--94.
[12]
Perdaen D., D. Armbruster, K. Kempf, and E. Lefeber. 2008. "Controlling a Reentrant Manufacturing Line via the Push-pull Point." International Journal of Production Research 46:16 4521--4536.
[13]
Yeh T. M., F. Y. Pai, and C. S. Tsou 2008. "The Construction of a Real-time WIP Exception Monitoring System for Semiconductor Industry." In IEEE 4th International Conference on Wireless Communications, Networking and Mobile Computing 1--4.
[14]
Zhou, Z. 2014. "WIP Balance and Due Date Control for Complex Job Shops (Wafer Fabs)." Ph.D. thesis, Department of Computer Science, die Universität der Bundeswehr München, Germany. http://athene-forschung.rz.unibw-muenchen.de/node?id=97064 {Accessed March 17, 2015}.
[15]
Zhou, Z., and O. Rose. 2009. "A Bottleneck Detection and Dynamic Dispatching Strategy for Semiconductor Wafer Fabrication Facilities.", In Proceedings of the 2009 Winter Simulation Conference edited by M. D. Rossetti, R. R. Hill, B. Johansson, A. Dunkin and R. G. Ingalls, 1646-1656. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[16]
Zhou, Z., and O. Rose. 2010. "A Pull/Push Concept for Tool Group Workload Balance in a Wafer Fab." In Proceedings of the 2010 Winter Simulation Conference, edited by B. Johansson, S. Jain, J. Montoya-Torres, J. Hugan, and E. Yücesan, 2512-2516. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[17]
Zhou, Z., and O. Rose. 2011. "A Composite Rule Combining Due Date Control and WIP Balance in a Wafer Fab." In Proceedings of the 2011 Winter Simulation Conference, edited by S. Jain, R. R. Creasey, J. Himmelspach, K. P. White, and M. Fu, 2085-2092. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[18]
Zhou, Z., and O. Rose. 2012a. "WIP Balance and Due Date Control in a Wafer Fab with Low and High Volume Products." In Proceedings of the 2012 Winter Simulation Conference, edited by C. Laroque, J. Himmelspach, R. Pasupathy, O. Rose, and A. M. Uhrmacher, 2019-2026. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[19]
Zhou, Z., and O. Rose. 2012b. "WIP Control and Calibration in a Wafer Fab." In Proceedings of the 2012 Winter Simulation Conference, edited by C. Laroque, J. Himmelspach, R. Pasupathy, O. Rose, and A. M. Uhrmacher. Piscataway, 2007-2018. New Jersey: Institute of Electrical and Electronics Engineers, Inc.
[20]
Zhou, Z., and O. Rose. 2013. "Cycle Time Variance Minimization for WIP Balance Approaches in Wafer Fabs." In Proceedings of the 2013 Winter Simulation Conference, edited by R. Pasupathy, S.-H. Kim, A. Tolk, R. Hill, and M. E. Kuhl, 3777-3788. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
- A framework for effective shop floor control in wafer fabs
Recommendations
Pull control for job shop: holonic manufacturing system approach using multicriteria decision-making
Faced with international competition, industrial production increasingly requires implementation conditions which, in some cases, lead to seek new techniques for workshop control. This is the case when it is asked to establish Just in Time management in ...
Tooling constraints and shop floor scheduling: A simulation study
AbstractResearch into the problems of job shop scheduling has dealt with two of three major categories of shop floor resources: machine capacity and labor. Generally ignored has been the impact of tooling constraints, the third form of shop floor ...
Shop floor control simulation with a combined process/resource-oriented approach
SMO'05: Proceedings of the 5th WSEAS international conference on Simulation, modelling and optimizationShop floor control systems (SFCS) are used to make real-time planning and scheduling decisions to optimize the efficiency of manufacturing shops. These shops exhibit a non-linear, dynamic evolution. While simulation models are often used in the ...
Comments
Please enable JavaScript to view thecomments powered by Disqus.Information & Contributors
Information
Published In
December 2015
4051 pages
ISBN:9781467397414
Sponsors
Publisher
IEEE Press
Publication History
Published: 06 December 2015
Check for updates
Qualifiers
- Research-article
Conference
WSC '15
Sponsor:
Acceptance Rates
WSC '15 Paper Acceptance Rate 202 of 296 submissions, 68%;
Overall Acceptance Rate 3,413 of 5,075 submissions, 67%
Contributors
Other Metrics
Bibliometrics & Citations
Bibliometrics
Article Metrics
- 0Total Citations
- 23Total Downloads
- Downloads (Last 12 months)0
- Downloads (Last 6 weeks)0
Reflects downloads up to 12 Dec 2024
Other Metrics
Citations
View Options
Login options
Check if you have access through your login credentials or your institution to get full access on this article.
Sign in